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The following contains a partial list of species which are regularly implanted.
Exotic species and isotopes not found on this list are also implanted.
- 1. Protons (up to 380 KeV for 3" and smaller, and 190 KeV for 4" Wafers)
- 2. Helium
- 3. Lithium
- 4. Beryllium
- 5. Boron
- 6. Carbon
- 7. Nitrogen
- 8. Oxygen
- 9. Magnesium
- 10. Aluminum
- 11. Silicon
- 12. Phosphorus
- 13. Argon
- 14. Gallium
- 15. Germanium
Many other ions are available for implant, send a request for quote to find
out if your ion implant requirements are within our processing capabilities.
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- 1. Regular energies for most species range from 25-190 KeV; however lower energies down to 5 KeV and higher energies (doubly ionized species) up to 380KeV are possible.
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- 2. Heated stage ion implantation is available up to 1000 degrees C for 3" diameter or smaller wafers/samples.
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- 3. Tilt angles up to 45 degrees are available, as well as wafer rotation.
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- 4. Serial feed processing ability for larger quantities of whole wafers is available.
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- 5. Unique and special ion implantation requests are always welcome. Please contact us to see if we can accommodate your requests.
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